Mechanical properties of anodic aluminum oxide for MEMS applications
(2009) Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures — Vol. 27, n° 1, p. 542-546 (2009)
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- Abstract
- Aluminum oxide features good electrical properties such as high dielectric constant and high breakdown voltage. During these last years it has been introduced for the fabrication of metal oxide semiconductor and metal insulator metal capacitors. In the present paper, the mechanical properties of anodic Al2O3 are addressed as well as its interest for microelectromechanical system applications including membranes or cantilevers for humidity, flow, pressure, or biological sensors.
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Moreno Hagelsieb, L., Flandre, D., & Raskin, J.-P. (2009). Mechanical properties of anodic aluminum oxide for MEMS applications. Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, 27(1), 542-546. https://doi.org/10.1116/1.3025906 (Original work published 2009)