Mobility characterization in FinFETs using split C-V technique

Kilchytska, Valeriya;Rudenko, Tamara;Collaert, N.;Rooyackers, R.;Flandre, Denis;et.al.
(2005) 6th International Conference on Ultimate integration of Silicon (ULIS 2005) — Location: Bologna, Italy (7.April.2005)

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Kilchytska, V., Rudenko, T., Collaert, N., Rooyackers, R., Jurczak, M., Raskin, J.-P., & Flandre, D. (2005). Mobility characterization in FinFETs using split C-V technique. Proceedings of the 6th International Conference on Ultimate integration of Silicon (ULIS 2005), 117-120. https://hdl.handle.net/2078.5/252916