True Silicon-On-Nothing MOSFETs fabricated by Si layer transfer over a pre-etched cavity

Kilchytska, Valeriya;Chung, M.;Vovk, Ya.N.;Raskin, Jean-Pierre;Flandre, Denis
(2007) Third Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits (EUROSOI 2007) — Location: Leuven, Belgium (24.January.2007)

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Kilchytska, V., Chung, M., Vovk, Ya. N., Raskin, J.-P., & Flandre, D. (2007). True Silicon-On-Nothing MOSFETs fabricated by Si layer transfer over a pre-etched cavity. Proceedings of EUROSOI 2007, Third Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits. Published. Third Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits (EUROSOI 2007), Leuven, Belgium. https://hdl.handle.net/2078.5/252850