The FD-SOI becomes an attractive choice for small research groups and SME’s, where research projects related to ASICs /MEMS integration are carried out. A MOSTXX application for MOSFET parameter extraction has been developed in the ITE as a cost effective tool for characterization of the CMOS ICs. Recently the EKV model, has been implemented. The paper reports results of EKV model parameter extraction for the FD-SOI MOSFETs. The analysis has been done using the MOSTXX software.