Fabrication of new Interdigital Transducers for Surface Acoustic Wave Device
(2015) 2015 International Congress on Ultrasonics (ICU 2015) — Location: Metz (France) (11.May.2015)
Files
FabricationofnewInterdigitalTransducersforSurfaceAcousticWaveDevice.pdf
Restricted Access - Adobe PDF
- 899.63 KB
Details
- Authors
- Abstract
- We investigate high-performance interdigital transducers (IDTs) for the generation of surface acoustic waves (SAWs) on AT-cut quartz, where the metal fingers are embedded in the substrate. Three micromachining techniques are used to manufacture SAW structures, namely an inductively coupled plasma, a laser etching and a reactive ion etching. An evaporated layer of Al and a Ni thick electroplating are used to grow the metals in the micromachining structures. A chemical mechanical polishing (CMP) technique is used to remove the exceeding metal and keep a flat surface. The electrical characterizations indicate that the fabricated devices are suited for sensing proposes with a low insertion loss and a linear phase. Results are reported emphasizing the efficiency of the Ni damascene process to manufacture SAW sensors with the embedded structures.
- Affiliations
Citations
El Fissi, L., Jaouad, A., Vandormael, D., & Francis, L. (2015). Fabrication of new Interdigital Transducers for Surface Acoustic Wave Device. Physics Procedia, p. 936-940. https://doi.org/10.1016/j.phpro.2015.08.194