SOI CMOS compatible low-power microheater optimization for the fabrication of smart gas sensors
(2004) IEEE Sensors Journal — Vol. 4, n° 5, p. 670-680 (2004)
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- Abstract
- In this paper, an original design of a polysilicon loop-shaped microheater on a 1-μm thin-stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation and very low power consumption (20 mW for heating at 400°C). Moreover, the use of completely CMOS compatible tetramethyl ammonium hydroxide-based bulk-micromachining techniques allows an easy, smart gas sensor integration in SOI-CMOS technology.
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Citations
Laconte, J., Dupont, C., Flandre, D., & Raskin, J.-P. (2004). SOI CMOS compatible low-power microheater optimization for the fabrication of smart gas sensors. IEEE Sensors Journal, 4(5), 670-680. https://doi.org/10.1109/JSEN.2004.833516 (Original work published 2004)