A review of fully-depleted SOI CMOS technology for microsystems

Demeûs, Laurent;Delatte, Pierre;Dessard, Vincent;Adriaensen, Stéphane;Flandre, Denis;et.al.
(2000) 3rd International Conference on Micro Materials — Location: Berlin (Germany) (17.April.2000)

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  • Demeûs, LaurentUCLouvain
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  • Delatte, PierreUCLouvain
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  • Dessard, VincentUCLouvain
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  • Adriaensen, StéphaneUCLouvain
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Demeûs, L., Delatte, P., Dessard, V., Adriaensen, S., Renaux, C., & Flandre, D. (2000). A review of fully-depleted SOI CMOS technology for microsystems. Proceedings of the 3rd International Conference on Micro Materials, 69-72. https://hdl.handle.net/2078.5/252603