Analytical model for selective laser annealing of SOI

Terao, A.;Paelinck, P.;Flandre, Denis;Verlinden, P.;Van de Wiele, Fernand
(1988) 1st European SOI Workshop — Location: Meylan (France) (15.March.1988)

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Authors
  • Terao, A.UCLouvain
    Author
  • Paelinck, P.
    Author
  • Author
  • Verlinden, P.UCLouvain
    Author
  • Van de Wiele, FernandUCLouvain
    Author
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Terao, A., Paelinck, P., Flandre, D., Verlinden, P., & Van de Wiele, F. (1988). Analytical model for selective laser annealing of SOI. Proceedings of the 1st European SOI Workshop, papier A04. https://hdl.handle.net/2078.5/252519