Internal stress relaxation based method to extract the Young's modulus of brittle and ductile thin layers

(2009) Innovations in Thin Film Processing and Characterization - ITFPC′09 — Location: Nancy - France (17.November.2009)

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Boé, A., Coulombier, M., Colla, M.-S., Bhaskar, U. K., Zulfiqar, A., Pardoen, T., & Raskin, J.-P. (2009). Internal stress relaxation based method to extract the Young’s modulus of brittle and ductile thin layers. Proceedings of the Innovations in Thin Film Processing ans Characterization, Paper O 3.3, p 12. https://hdl.handle.net/2078.5/236838