TEM characterization of freestanding metallic thin films deformed by controlled on chip internal stress

Wang, B.;Idrissi, H.;Colla, Marie-Stéphane;Coulombier, Michaël;Schrijvers, D.;et.al.
(2010) 17th International Microscopy Congress - IMC17 — Location: Rio de Janeiro, Brazil (19.September.2010)

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Wang, B., Idrissi, H., Colla, M.-S., Coulombier, M., Raskin, J.-P., Pardoen, T., & Schrijvers, D. (2010). TEM characterization of freestanding metallic thin films deformed by controlled on chip internal stress. Proceedings of the 17th International Microscopy Congress - IMC17, p. paper M12505. https://hdl.handle.net/2078.5/236833