Several electrical methods have been studied for the detection of DNA hybridization on silicon chips, using capacitance or resistance changes of micro-arrays of electrode fingers. In this work, we studied the possibility of detecting DNA by the measurement of the resonance frequency shift of an inductor designed on Si substrate. Self-resonance frequency shift as large as 10 GHz before and after DNA hybridization has been measured for inductors made from standard CMOS process. with a protective oxide coating and a DNA amplification based on silver enhancement.
Laurent, G., Moreno Hagelsieb, L., Lederer, D., Lobert, P. E., Flandre, D., Remacle, J.-F., & Raskin, J.-P. (2003). DNA electrical detection based on inductor resonance frequency in standard CMOS technology. In Franca, J.; Freitas, P. (ed.), Proceedings of the 29th European Solid-State Device Research (ESSDERC ’03) (pp. 171-174). IEEE. https://doi.org/10.1109/ESSCIRC.2003.1257141