New inductive and capacitive sensors have been developed in order to electrically detect specific DNA sequences on a low cost CMOS-compatible technology. The sensors are made of Al electrodes coated with Al/sub 2/O/sub 3/ surface permitting efficient on-chip single strand DNA capture probe thetering. We detect a shift of the self-resonance frequency of about 5.6 GHz (25%) with a spiral inductor upon hybridation with complementary single strand DNA target probe at a 5 nM concentration. For interdigitated capacitors, we detect a shift of 4.2 GHz (52%). These results open DNA detection possibilities comparable to present optical detection methods.
Denef, N., Moreno Hagelsieb, L., Laurent, G., Pampin, R., Foultier, B., Remacle, B., Flandre, D., & Raskin, J.-P. (2004). RF detection of DNA based on CMOS inductive and capacitive sensors. Conference Proceedings. 34th European Microwave Conference (IEEE Cat.No.04EX963), Vol. 2, p. 669-72. https://hdl.handle.net/2078.5/231057