SOI CMOS compatible low-power microheater optimization and fabrication for smart gas sensor implementations
(2002) IEEE SENSORS 2002 conference — Location: Orlando (USA) (12.June.2002)
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- Abstract
- In this paper, an original design of a polysilicon loop-shaped microheater on a thin stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation (20.000 degrees C/W) and very low power consumption (20 mW for heating at 400 degrees C). Moreover, the use of completely CMOS compatible TMAH-based bulk-micromachining techniques allows an easy smart gas sensor integration in SOI-CMOS technology.
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Citations
Laconte, J., Dupont, C., Flandre, D., & Raskin, J.-P. (2002). SOI CMOS compatible low-power microheater optimization and fabrication for smart gas sensor implementations. Proceedings of IEEE Sensors 2002. First IEEE International Conferenceon Sensors (Cat. No.02CH37394), 1395-1400. https://doi.org/10.1109/ICSENS.2002.1037325