Fabrication process for applying high mechanical stress on monocrystalline silicon film

Passi, Vikram;Bhaskar, Umesh Kumar;Pardoen, Thomas;Raskin, Jean-Pierre
(2010) 6th International SemOI Conference and 1st Ukrainian-French Seminar “Semiconductor-on-Insulator materials, devices and circuits: physics, technology and diagnostics” — Location: Kyiv, Ukraine (25.October.2010)

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Passi, V., Bhaskar, U. K., Pardoen, T., & Raskin, J.-P. (2010). Fabrication process for applying high mechanical stress on monocrystalline silicon film. Proceedings of the 6th International SemOI Conference and 1st Ukrainian-French Seminar “Semiconductor-on-Insulator materials, devices and circuits: physics, technology and diagnostics”, pp. 125-126. https://hdl.handle.net/2078.5/230855