Mechanical and electromechanical on-chip testing of mono- and poly-crystalline silicon nanobeams
(2010) 2010 Materials Research Society Fall Meeting - MRS Fall′10 — Location: Boston, MA, USA
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Raskin, J.-P., Passi, V., Bhaskar, U. K., Zulfiqar, A., & Pardoen, T. (2010). Mechanical and electromechanical on-chip testing of mono- and poly-crystalline silicon nanobeams. Proceedings of the 2010 Materials Research Society Fall Meeting - MRS Fall′10. Published. 2010 Materials Research Society Fall Meeting - MRS Fall′10, Boston, MA, USA. https://hdl.handle.net/2078.5/230841