MEMS based microstructures for nanomechanical characterization of thin films
(2009) GDR MECANO - 2ème atelier général Ecole des Mines de Paris — Location: Paris (23.April.2009)
Files
No attached file found for this publication.
Details
- Authors
- Affiliations
Citations
Boé, A., Coulombier, M., Ryelandt, S., Pardoen, T., & Raskin, J.-P. (2009). MEMS based microstructures for nanomechanical characterization of thin films. GDR MECANO - 2ème atelier général Ecole des Mines de Paris, Paris. https://hdl.handle.net/2078.5/230775