On-chip testing laboratory for nanomechanical characterization of thin films
(2009) the 2009 SEM Annual Conference and Exposition on Experimental and Applied Mechanics — Location: Albuquerque, NM USA (1.June.2009)
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Boé, A., Coulombier, M., Safi, A., Pardoen, T., & Raskin, J.-P. (2009). On-chip testing laboratory for nanomechanical characterization of thin films. Proceedings of the 2009 SEM Annual Conference and Exposition on Experimental and Applied Mechanics, p. -. https://hdl.handle.net/2078.5/230711