MEMS microstructures for the nanomechanical characterization of thin films
(2008) International Conference on Multifunctional Materials and Structures — Location: Hong-Kong, Chine (28.July.2008)
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Boé, A., Safi, A., Coulombier, M., Pardoen, T., & Raskin, J.-P. (2008). MEMS microstructures for the nanomechanical characterization of thin films. Proceedings of the International Conference on Multifunctional Materials and Structures, p. paper # MF382. https://hdl.handle.net/2078.5/230709