Bulk and surface micromachined SOI MEMS: from sensors to testing micromachines
(2006) 4th International Society of Electrochemistry (ISE) Spring Meeting 2006 — Location: Singapore (17.April.2006)
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Raskin, J.-P., Iker, F., Andre, N., Olbrecht, B., Fabregue, D., Bertholet, Y., Flandre, D., & Pardoen, T. (2006). Bulk and surface micromachined SOI MEMS: from sensors to testing micromachines. Proceedings of the 4th International Society of Electrochemistry (ISE) Spring Meeting 2006, p. 63. https://hdl.handle.net/2078.5/230599