Nanomechanical testing of free-standing monocrystalline silicon beams

Bhaskar, Umesh Kumar;Houri, Samer;Passi, Vikram;Pardoen, Thomas;Raskin, Jean-Pierre
(2011) 219th ECS Meeting - Symposium E8 - Advanced Semiconductor-on-Insulator Technology and Related Physics — Location: Montreal, Canada (1.May.2001)

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Bhaskar, U. K., Houri, S., Passi, V., Pardoen, T., & Raskin, J.-P. (2011). Nanomechanical testing of free-standing monocrystalline silicon beams. Proceedings of the 219th ECS Meeting, p. paper #1446. https://hdl.handle.net/2078.5/230596