Nanomechanical testing of free-standing monocrystalline silicon beamsBhaskar, Umesh Kumar;Houri, Samer;Passi, Vikram;Pardoen, Thomas;Raskin, Jean-Pierre(2011) 219th ECS Meeting - Symposium E8 - Advanced Semiconductor-on-Insulator Technology and Related Physics — Location: Montreal, Canada (1.May.2001)
FilesNo attached file found for this publication.DetailsAuthorsBhaskar, Umesh KumarUCLouvainAuthorHouri, SamerUCLouvainAuthorPassi, VikramUCLouvainAuthorPardoen, ThomasUCLouvainAuthorRaskin, Jean-PierreUCLouvainAuthorAffiliationsUCLouvainSST/ICTM/ELEN - Pôle en ingénierie électriqueUCLouvainSST/IMMC/IMAP - Materials and process engineeringShow moreCitations APA Chicago FWB Bhaskar, U. K., Houri, S., Passi, V., Pardoen, T., & Raskin, J.-P. (2011). Nanomechanical testing of free-standing monocrystalline silicon beams. Proceedings of the 219th ECS Meeting, p. paper #1446. https://hdl.handle.net/2078.5/230596