On-chip MEMS-based internal stress actuated structures for the mechanical testing of freestanding thin film materials
(2014) 9th European Conference on Residual Stress — Location: Troyes, France (7.July.2014)
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Vayrette, R., Coulombier, M., Pardoen, T., & Raskin, J.-P. (2014). On-chip MEMS-based internal stress actuated structures for the mechanical testing of freestanding thin film materials. Proceedings of the 9th European Conference on Residual Stress. Published. 9th European Conference on Residual Stress, Troyes, France. https://hdl.handle.net/2078.5/229810