Robust design of micro-and nano-systems requires proper knowledge of the mechanical properties of the system components. As size effects play a prominent role at the submicron scale, materials must be tested at the relevant structural scale. Measurements of mechanical properties on submicron sized specimens are extremely challenging due to difficulties for manipulating samples, for applying small load and for extracting accurate stresses and strains. We present a novel, versatile concept of micro and nano- machines to measure the mechanical response, up to large strains and fracture, of metal, polymer or ceramic films or beams with dimensions ranging between 10 to 1000nm, allowing multiple loading configurations and geometries.
Pardoen, T., Fabrègue, D., Coulombier, M., André, N., & Raskin, J.-P. (2006). Micromechanical Testing Lab-on-chip for Nano-sized Materials. Proceedings of the 2006 Materials Research Society (MRS) Fall Meeting. Published. 2006 Materials Research Society (MRS) Fall Meeting, Boston, MA (USA). https://hdl.handle.net/2078.5/228341