Ultra-low-power chemiresistive microsensor array in a back-end CMOS process towards selective volatile compounds detection and IoT applications

Marchand, Nicolas;Walewyns, Thomas;Lahem, D.;Debliquy, M.;Francis, Laurent
(2017) 2017 ISOCS/IEEE International Symposium on Olfaction and Electronic Nose (ISOEN 2017) — Location: Montréal (canada) (28.May.2017)

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Authors
  • Marchand, NicolasUCLouvain
    Author
  • Walewyns, ThomasUCLouvain
    Author
  • Lahem, D.Materia Nova, Mons/Belgium
    Author
  • Debliquy, M.Department of Materials Science, Université de Mons, Mons/belgium
    Author
  • Francis, Laurentorcid-logoUCLouvain
    Author
Abstract
We describe an ultra-low-power volatile compounds microsensor array towards increased selectivity and sensitivity. The chemiresistive transducers are 100 nm-thick interdigitated gold microelectrodes coated with polypyrrole based polymer. Two sensors arrays were implemented with respectively 3 x 3 and 2 x 2 pixels², showing a surface per pixel down to 400 x 200 μm². The fabrication is fully CMOS compatible and the polymer coating is performed at wafer level by electropolymerization, using a differential pulse method from 1.1 to 1.5 V. The polymer film thickness varies from 1.2 to 1.5 μm. Looking at ammonia detection, a sensitivity up to 80 % at 5 ppm in nitrogen is achieved, while consuming below 20 μW continuously. Finally, temperature and humidity effects are analyzed at 25 and 45 °C, from 45 to 95 % RH. Such devices are very promising for remote environmental monitoring applications requiring low-cost low-power sensors associated with dedicated electronics.
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Marchand, N., Walewyns, T., Lahem, D., Debliquy, M., & Francis, L. (2017). Ultra-low-power chemiresistive microsensor array in a back-end CMOS process towards selective volatile compounds detection and IoT applications. 2017 ISOCS/IEEE International Symposium on Olfaction and Electronic Nose (ISOEN 2017), Montréal (canada). https://hdl.handle.net/2078.5/227391