Direct wafer bonding front propagation dynamics

Navarro, E.;Bréchet, Yves;Moreau , R.;Pardoen, Thomas;Radu, I.;et.al.
(2013) WaferBond’13 — Location: Stockhom, Suède (4.December.2013)

Files

No attached file found for this publication.

Details

Authors
  • Navarro, E.SOITEC, Bernin, France
    Author
  • Bréchet, YvesSIMaP, Université de Grenoble Alpes, France
    Author
  • Moreau , R.
    Author
  • Author
  • Author
  • Radu, I.SOITEC, Bernin, France
    Author
Show more
Affiliations

Citations

Navarro, E., Bréchet, Y., Moreau, R., Pardoen, T., Raskin, J.-P., Barthelemy, A., & Radu, I. (2013). Direct wafer bonding front propagation dynamics. Book of abstracts. Published. WaferBond’13, Stockhom, Suède. https://hdl.handle.net/2078.5/227249