On-Chip tensile testing of the mechanical and electro-mechanical properties of nano-scale silicon free-standing beams up to fracture
(2013) PiezoNEMS 2013 - PHELMA-Polygone — Location: Grenoble, France (11.November.2013)
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Raskin, J.-P., Bhaskar, U. K., & Pardoen, T. (2013). On-Chip tensile testing of the mechanical and electro-mechanical properties of nano-scale silicon free-standing beams up to fracture. Book of abstracts. Published. PiezoNEMS 2013 - PHELMA-Polygone, Grenoble, France. https://hdl.handle.net/2078.5/227077