MEMS microstructures for the nanomechanical characterization of thin films

Mazzoni-Leduc, L.;Pardoen, Thomas;Massart, T.J.
(2008) 8th. World Congress on Computational Mechanics (WCCM8) & 5th. European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2008) — Location: Venise, Italie (30.June.2008)

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Mazzoni-Leduc, L., Pardoen, T., & Massart, T. J. (2008). MEMS microstructures for the nanomechanical characterization of thin films. Proceedings of 8th. World Congress on Computational Mechanics (WCCM8) & 5th. European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2008). 8th. World Congress on Computational Mechanics (WCCM8) & 5th. European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2008), Venise, Italie. https://hdl.handle.net/2078.5/226056