Self-planarization: a new concept for 3-D and high density integrated circuits
(1988) FED 3D Workshop 1988 — Location: Miyagi-Zao (Japan) (30.May.1988)
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Terao, A., Paelinck, P., Flandre, D., Verlinden, P., & Van de Wiele, F. (1988). Self-planarization: a new concept for 3-D and high density integrated circuits. Proceedings of the FED 3D Workshop 1988, 165-169. https://hdl.handle.net/2078.5/224864