Adhesion and separation models for direct hydrophilic bonding

Navarro, Etienne;Bréchet, Yves;Barthelemy, A.;Radu, I.;Raskin, Jean-Pierre;et.al.
(2015) Journal of Applied Physics — Vol. 117, p. 085305-1 - 085305-6 (2015)

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Authors
  • Navarro, EtienneSOITEC, Bernin, France
    Author
  • Bréchet, YvesSIMaP - Grenoble INP, St Martin d'Hères, France
    Author
  • Barthelemy, A.SOITEC, Bernin, France
    Author
  • Radu, I.SOITEC, Bernin, France
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Abstract
A simple model describing the hydrophilic adhesion between solid surfaces, with low roughness is proposed to explain both the influence of the interface roughness and quantity of water present at the interface on the work of adhesion and work of separation. The observed hysteresis between adhesion and separation is explained by the evolving distribution of water along the bonding interface. This model is based on earlier molecular dynamics simulations of hydrophilic direct bonding previously obtained by Cole et al. An experimental validation is presented showing good agreement with model predictions.
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Citations

Navarro, E., Bréchet, Y., Barthelemy, A., Radu, I., Pardoen, T., & Raskin, J.-P. (2015). Adhesion and separation models for direct hydrophilic bonding. Journal of Applied Physics, 117, 085305-1 - 085305-6. https://doi.org/10.1063/1.4913481 (Original work published 2015)