Hemispherical cavities on silicon substrates: an overview of micro fabrication techniques
(2018) Materials Research Express ā Vol. 5, nĀ° 4, p. 45702 (2018)
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- Abstract Hemispherical photonic crystals found in species like Papilio blumei and Cicendella chinensis have inspired new applications like anti-counterfeiting devices and gas sensors. In this work, we investigate and compare four different ways to micro fabricate such hemispherical cavities: using colloids as template, by wet (HNA) or dry (XeF2) isotropic etching of silicon, and by electrochemical etching of silicon. The shape and the roughness of the obtained cavities have been discussed and the pros/cons for each method are highlighted.
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Poncelet, O., Rasson, J., Tuyaerts, R., Coulombier, M., Kotipalli, R. R. V., Raskin, J.-P., & Francis, L. (2018). Hemispherical cavities on silicon substrates: an overview of micro fabrication techniques. Materials Research Express, 5(4), 45702. https://doi.org/10.1088/2053-1591/aab907 (Original work published 2018)