Optical studies for MEMS thermomechanical characterization
(2003) Photomec′02 — Location: Louvain-la-Neuve (Belgium) (20.February.2003)
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- Abstract
- We present different optical techniques to characterize Micro-Electro-Mechanical Systems (MEMS) components. The temperature, topography and displacement of a MEMS related to its mechanical characteristics can be extracted using optical reflections. The MEMS under consideration in this paper is microheater composed of a loop-shaped resistor (heater) in phosphorus doped polysilicon.
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Citations
Jorez, S., Laconte, J., Raskin, J.-P., Cornet, A., Grauby, S., Dilhaire, S., & Claeys, W. (2003). Optical studies for MEMS thermomechanical characterization. Photomec′02, Louvain-la-Neuve (Belgium). https://hdl.handle.net/2078.5/228708