Electron Microscopy Analysis of MOSFET Structures

Katcki, J.;Ratajczak, J.;Laszcz, J.;Philipp, F.;Tang, Xiaohui;et.al.
(2003) IEEE 6th Symposium Diagnostics and Yield 2003 — Location: Warsaw (Poland) (22.June.2003)

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  • Katcki, J.Institute of Electron Technology, Warsaw
    Author
  • Ratajczak, J.Institute of Electron Technology, Warsaw
    Author
  • Laszcz, J.Institute of Electron Technology, Warsaw
    Author
  • Philipp, F.IEMN/ISEN, Villeneuve d'Ascq
    Author
  • Baie, XavierUCLouvain
    Author
  • Tang, XiaohuiUCLouvain
    Author
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Katcki, J., Ratajczak, J., Laszcz, J., Philipp, F., Dubois, E., Larrieu, G., Baie, X., & Tang, X. (2003). Electron Microscopy Analysis of MOSFET Structures. IEEE 6th Symposium Diagnostics and Yield 2003, Warsaw (Poland). https://hdl.handle.net/2078.5/231781