Electron Microscopy Analysis of MOSFET StructuresKatcki, J.;Ratajczak, J.;Laszcz, J.;Philipp, F.;Tang, Xiaohui;et.al.(2003) IEEE 6th Symposium Diagnostics and Yield 2003 — Location: Warsaw (Poland) (22.June.2003)
FilesNo attached file found for this publication.DetailsAuthorsKatcki, J.Institute of Electron Technology, WarsawAuthorRatajczak, J.Institute of Electron Technology, WarsawAuthorLaszcz, J.Institute of Electron Technology, WarsawAuthorPhilipp, F.IEMN/ISEN, Villeneuve d'AscqAuthorBaie, XavierUCLouvainAuthorTang, XiaohuiUCLouvainAuthorShow more AffiliationsUCLouvainFSA/ELEC - Département d'électricitéShow moreCitations APA Chicago FWB Katcki, J., Ratajczak, J., Laszcz, J., Philipp, F., Dubois, E., Larrieu, G., Baie, X., & Tang, X. (2003). Electron Microscopy Analysis of MOSFET Structures. IEEE 6th Symposium Diagnostics and Yield 2003, Warsaw (Poland). https://hdl.handle.net/2078.5/231781