Characterising the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures
(2010) 2010 Materials Research Society Fall Meeting - MRS Fall′10 — Location: Boston, MA, USA (29.November.2010)
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Escobedo-Cousin, E., Raskin, J.-P., Bhaskar, U. K., Pardoen, T., & Olsen, S. (2010). Characterising the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures. Proceedings of the 2010 Materials Research Society Fall Meeting, p. Paper # S3.4. https://hdl.handle.net/2078.5/230630