Surface roughness characterisation of strained silicon structures using AFM
(2012) The 14th edition of the Annual Research Conference – ARC’12 — Location: Newcastle, UK (25.January.2012)
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Urena, F., Raskin, J.-P., & Olsen, S. H. (2012). Surface roughness characterisation of strained silicon structures using AFM. Proceedings of the The 14th edition of the Annual Research Conference – ARC’12, p. 23. https://hdl.handle.net/2078.5/230594