Transmission electron microscopy study of erbium silicide formation using a Pt/Er stack on a thin silicon-on-insulator substrate

Laszcz, A.;Jatcki, J.;Ratajczak, J.;Tang, Xiaohui;Dubois, Emmanuel
(2005) XII International Conference on Electron Microscopy of Solids — Location: Kazimierz Dolny (Poland) (2005.June.0AD)

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  • Laszcz, A.Institute of Electron Technology, Warsaw
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  • Jatcki, J.Institute of Electron Technology, Warsaw
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  • Ratajczak, J.Institute of Electron Technology, Warsaw
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  • Tang, XiaohuiUCLouvain
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  • Dubois, EmmanuelIEMN, France
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Laszcz, A., Jatcki, J., Ratajczak, J., Tang, X., & Dubois, E. (2005). Transmission electron microscopy study of erbium silicide formation using a Pt/Er stack on a thin silicon-on-insulator substrate. XII International Conference on Electron Microscopy of Solids, Kazimierz Dolny (Poland). https://hdl.handle.net/2078.5/252733