Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications
(2004) the SPIE Conference on Micromachining and Microfabrication Process Technology — Location: San Francisco - CA (2004)
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Van der Donck, T., Proost, J., Baert, K., Van Hoof, C., & Witvrouw, A. (2004). Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications. Proceedings, p. 8-18. https://hdl.handle.net/2078.5/222002