Design and fabrication of RF-MEMS devices on high resistivity silicon substrate
(2010) 11th International Symposium on RF MEMS and RF Microsystems – MEMSWAVE 2010 — Location: Otranto, Italy (28.June.2010)
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Ben Ali, K., Roda Neve, C., André, N., Gharsallah, A., & Raskin, J.-P. (2010). Design and fabrication of RF-MEMS devices on high resistivity silicon substrate. Proceedings of the 11th International Symposium on RF MEMS and RF Microsystems – MEMSWAVE 2010, p. paper P10. https://hdl.handle.net/2078.5/272211