Micro-electro-mechanical testing of freestanding ultrathin aluminum oxide films
(2013) 2013 Fall Meeting of the Materials Research Society - Symposium on Microelectromechanical Systems-Materials and Devices — Location: Boston, USA (1.December.2013)
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van der Rest, A., Van Overmeere, Q., Henry, F., Proost, J., & Pardoen, T. (2013). Micro-electro-mechanical testing of freestanding ultrathin aluminum oxide films. Proceedings of the 2013 Fall Meeting of the Materials Research Society, Abstract XX.10.07. https://hdl.handle.net/2078.5/70635