Preconcentrator-based sensor mu -system for low-level benzene detection
(2008) Smart Structures, Devices, and Systems IV — Location: Melbourne, VIC, Australia
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- Abstract
- In this paper, a preconcentrator-based sensor mu -system for low level benzene detection is presented. It consists of a spiral-shaped mu -reconcentrator with dimensions of 10 cm * 300 mu m * 300 mu m, followed by a mu -hotplate sensor matrix. The mu -preconcentrator was fabricated on a silicon wafer by means of DRIE and anodic bonding techniques. To obtain the concentration factor of the fabricated devices, a GC/MS: Shimadzu-QP5000 equipment was used. The results obtained showed excellent repeatability and preconcentration factors up to 286. A considerable improvement (1500%) in the sensor responses was achieved with Pd doped SnO/sub 2/ sensors. The small size of the manufactured devices enables their incorporation in an integrated GC/MS gas sensor system.
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Ivanov, P., Gracia, I., Blanco, F., Raskin, J.-P., Cumeras, R., Sabate, N., Vilanova, X., Correig, X., Fonseca, L., Figueras, E., Santander, J., & Cane, C. (2008). Preconcentrator-based sensor mu -system for low-level benzene detection. Smart Structures, Devices, and Systems IV, Vol. 7268, 72680S (8 pp.). https://doi.org/10.1117/12.807433