Surface topography development of thin polystyrene films under low energy ion irradiation
(1999) Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms — Vol. 151, n° 1-4, p. 129-134 (1999)
Files
pdfdocument.pdf
Restricted Access - Adobe PDF
- 334.75 KB
Details
- Authors
- Abstract
- Morphological changes of spin-coated thin polystyrene (PS) films due to low energy Xe+ bombardment in the energy range from 660 eV to 4 keV are investigated. These surface modifications are characterised by means of Atomic Force Microscopy (AFM). No significant topographical change between pristine and irradiated film surfaces is found for ion energy higher than 1.5 keV in the ion fluence range between 4 x 10(14) and 4 x 10(16) cm(-2). An increase of surface roughness is however obtained after ion bombardment for energy lower than 2 keV at the highest ion fluence. Moreover, a strong change of the morphology is observed after an irradiation with Xef for energy less than 1.25 keV, and ion fluences higher than 5x10(16) cm(-2). The surface roughness increases and well-defined features appear. Their evolution is followed as a function of the fluence in the 5 x 10(16)-2x 10(17) cm(-2) range for 1 keV Xe+ irradiation. ToF-SIMS analyses in area bombarded in such conditions reveal deep modifications of the surface composition and structure, indicating the formation of a Carbon Black form. The energy threshold observed for the development of surface morphology features is explained on the basis of the balance between surface damage and sputtering induced by the primary ion beam. (C) 1999 Elsevier Science B.V. All rights reserved.
- Affiliations
Citations
Netcheva, S., & Bertrand, P. (1999). Surface topography development of thin polystyrene films under low energy ion irradiation. Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 151(1-4), 129-134. https://doi.org/10.1016/S0168-583X(99)00145-7 (Original work published 1999)