Extended study of crosstalk in SOI-SIMOX substrates

Raskin, Jean-Pierre;Viviani, A.;Flandre, Denis;Colinge, Jean-Pierre;Vanhoenacker-Janvier, Danielle
(1995) International Electron Devices Meeting 1995 (IEDM 1995) — Location: Washington, DC (USA) (10.December.1995)

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  • Author
  • Viviani, A.UCLouvain
    Author
  • Author
  • Colinge, Jean-PierreUCLouvain
    Author
  • Vanhoenacker-Janvier, DanielleUCLouvain
    Author
Abstract
This work analyzes crosstalk phenomena in SOI-SIMOX substrates by means of two-dimensional device simulations and measurements on test structures. The influence of the substrate resistivity and of guard rings is studied. The results are compared with those obtained for standard CMOS technology. A significant crosstalk reduction, up to 10 GHz, is obtained with high-resistivity substrates. A simple modeling is proposed to explain and simulate the phenomenon
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Raskin, J.-P., Viviani, A., Flandre, D., Colinge, J.-P., & Vanhoenacker-Janvier, D. (1995). Extended study of crosstalk in SOI-SIMOX substrates. Proceedings of the International Electron Devices Meeting 1995 (IEDM 1995), 713-716. https://doi.org/10.1109/IEDM.1995.499318