Improvement of Depth Resolution in Secondary Ion Mass Spectrometry Analysis Using Multiresolution Deconvolution
(2009) Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres — Vol. 48, n° 6 (2009)
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- Abstract
- Multiresolution deconvolution (MD), based on Tikhonov-Miller regularization and wavelet transformation, was developed and applied to improve the depth resolution of secondary ion mass spectrometry (SIMS) profiles. Both local application of the regularization parameter and shrinking the wavelet coefficients of blurred and estimated solutions at each resolution level in MD provide to smoothed results without the risk of generating artifacts related to noise content in the profile. This led to a significant improvement in the depth resolution. The SIMS profiles were obtained by analysis of delta layers of boron in a silicon matrix using a Cameca-lms6f instrument. The results obtained by using the MID algorithm are compared to those obtained by monoresolution deconvolution which is Tikhonov-Miller regularization with a model of solution (TMMS). Finally, the advantages and limitations of the MD algorithm are presented and discussed. (C) 2009 The Japan Society of Applied Physics
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Boulakroune, M., Benatia, D., & Kezai, T. (2009). Improvement of Depth Resolution in Secondary Ion Mass Spectrometry Analysis Using Multiresolution Deconvolution. Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres, 48(6). https://doi.org/10.1143/JJAP.48.066503 (Original work published 2009)