Bulk and surface micromachined MEMS in thin film SOI technology
(2009) Advanced Substrate News — Vol. ASN 12, n° Spring 2009, p. 5 pages (2009)
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Raskin, J.-P. (2009). Bulk and surface micromachined MEMS in thin film SOI technology. Advanced Substrate News, ASN 12(Spring 2009), 5 pages. https://hdl.handle.net/2078.5/206213 (Original work published 2009)