On a chip MEMS based mechanical testing
(2018) Workshop on stress in microelectronics — Location: Leuven, Belgium (10.September.2018)
Files
No attached file found for this publication.
Details
- Authors
- Affiliations
Citations
Pardoen, T., Raskin, J.-P., Coulombier, M., Jaddi, S., Ghidelli, M., Vayrette, R., & Idrissi, H. (2018). On a chip MEMS based mechanical testing. Workshop on stress in microelectronics, Leuven, Belgium. https://hdl.handle.net/2078.5/231920