Novel parametric-effect MEMS amplifiers/transducers
(2000) Proceedings of 7th International Conference on New Actuators - ACTUATOR 2000 — Location: Bremen, Germany (19.June.2000)
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- Abstract
- A parametric effect amplifier has been built at 200 kHz (input) and 1.84 MHz (output) using a MEMS time-varying capacitor. The capacitor is composed of a thin low stress metallized silicon-nitride diaphragm and is pumped by a large signal voltage at 1.64 MHz. This results in a large change in the capacitance, and parametric amplification of an input signal at 200 kHz. To our knowledge, this device is the first-ever mechanical up-converter parametric-effect amplifier, with an up-conversion ratio of 9:1.
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Citations
Raskin, J.-P., Khuri-Yakub, B. T., & Rebeiz, G. M. (2000). Novel parametric-effect MEMS amplifiers/transducers. In Borgmann, H.; (ed.), ACTUATOR 2000. 7th International Conference on New Actuators andInternational Exhibition on Smart Actuators and Drive Systems.Conference Proceedings (p. p. 494-497). Messe bremen gmbh. https://hdl.handle.net/2078.5/230758