Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves
(2006) Journal of Materials Research — Vol. 21, p. 3161-3167 (2006)
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Jonas, A., Iacopi, F., & et al. (2006). Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves. Journal of Materials Research, 21, 3161-3167. https://hdl.handle.net/2078.5/270375 (Original work published 2006)