CMOS compatible 3-D MEMS in SOI technology

André, Nicolas;Iker, François;Raskin, Jean-Pierre
(2007) Third Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits – EuroSOI’07 — Location: Leuven, Belgium (24.January.2007)

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André, N., Iker, F., & Raskin, J.-P. (2007). CMOS compatible 3-D MEMS in SOI technology. Proceedings of the Third Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits – EuroSOI’07, pp. 69-70. https://hdl.handle.net/2078.5/272239