Polyimide as versatile enabling material for microsystems fabrication: electrodeposited nanowires integration and surface micromachining

Walewyns, Thomas;Reckinger, Nicolas;Ryelandt, Sophie;Pardoen, Thomas;Francis, Laurent;et.al.
(2012) 5ème Colloque du Laboratoire International Associé “Nanotechnologies & Nanosystèmes — Location: Orford (Québec) (15.July.2012)

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Walewyns, T., Reckinger, N., Ryelandt, S., Pardoen, T., Raskin, J.-P., & Francis, L. (2012). Polyimide as versatile enabling material for microsystems fabrication: electrodeposited nanowires integration and surface micromachining. Proceedings du 5ème Colloque du Laboratoire International Associé “Nanotechnologies & Nanosystèmes, p. 103 - Paper GE21. https://hdl.handle.net/2078.5/230663