CMOS compatible 2-D self-assembled MEMS in thin film SOI technology
(2004) Union Radio-Scientifique Internationale (U.R.S.I.) — Location: Brussels, Belgium
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Iker, F., Si Moussa, M., André, N., Pardoen, T., & Raskin, J.-P. (2004). CMOS compatible 2-D self-assembled MEMS in thin film SOI technology. Proceedings, p. 66. https://hdl.handle.net/2078.5/272248