Verification of Reference Impedance from Common On-Wafer Calibrations on Commercial Calibration Substrates
(2023) 101st ARFTG Microwave Measurement Conference (ARFTG) — Location: San Diego, USA (30.November.2023)
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Verification_of_Reference_Impedance_from_Common_On-Wafer_Calibrations_on_Commercial_Calibration_Substrates.pdf
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- Abstract
- Thispapercomparesthereferenceimpedance PZrefRofcommonon-wafercalibrationsPWXLT,LRRM,multi- lineTRLRonacommercialcalibrationsubstrate._irst,amethod toextractZrefofacalibration,basedonthecalibrationcompari- sontechnique,ispresented.btsaplicationshowsthatlumped- standardcalibrationshavecomparableZrefuptodef-gfhHzbut requireacuratelumpedstandardscharacterization,andLRRM Zrefisdemonstratedtobeparticularlysensitivetoprobemis- placementonThruandLoadstandards.btthereforeconfirms mTRLasreferencecalibration.However,measurementsoftwo commercialcalibrationsubstrateshaveshownthatevenmTRL Zrefsufersfrom systematicerorslinkedtoviolationoftheas- sumptionsmnofandfrequency-independentpnlinetermsused tocomputethelinecharacteristicimpedance.
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L. Nyssens, Rack, M., Tuyaerts, R., Lederer, D., & Raskin, J.-P. (2023). Verification of Reference Impedance from Common On-Wafer Calibrations on Commercial Calibration Substrates. 101st ARFTG Microwave Measurement Conference (ARFTG), San Diego, USA. https://hdl.handle.net/2078.5/164320