Modelling, characterization and testing of an ortho-planar micro-valve

Smal, Olivier;Dehez, Bruno;Raucent, Benoît;De Volder, Michael;Puers, Robert;et.al.
(2008) Journal of Micro-Nano Mechatronics — Vol. 4, n° 3, p. 131-143 (2008)

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This paper presents the design, the realization and the modelling of an ortho-planar one-way microvalve that can be used in a micropump. The main advantages of such valves are that they are very compact and can be made from a single flat piece of material. An analytical model of the spring deflection has been developed and tested, and results are compared to Finite Elements Modelling. Several prototypes with a bore of 0.2 mm have been built using two manufacturing techniques, micro Electro Discharge Machining and stereo-lithography, and tested for a pressure up to 7 bars.
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Smal, O., Dehez, B., Raucent, B., De Volder, M., Peirs, J., Reynaerts, D., Ceyssens, F., Coosemans, J., & Puers, R. (2008). Modelling, characterization and testing of an ortho-planar micro-valve. Journal of Micro-Nano Mechatronics, 4(3), 131-143. https://doi.org/10.1007/s12213-008-0015-9 (Original work published 2008)